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Proceedings Paper

New studies of reactive pulsed laser deposition
Author(s): Ion N. Mihailescu; Eniko Gyorgy; Valentin S. Teodorescu; Gheorghe Marin; D. Pantelica; A. Andrei; Johny Neamtu
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Paper Abstract

We report the synthesis and deposition of TiC films by reactive pulsed laser deposition. Ti targets have been submitted to multipulse UV laser action in low pressure CH4. The thin films were grown on a collector placed parallel to the target. The films were characterized by electron microscopy, electron spectroscopy and nuclear techniques.

Paper Details

Date Published: 2 July 1998
PDF: 6 pages
Proc. SPIE 3405, ROMOPTO '97: Fifth Conference on Optics, (2 July 1998); doi: 10.1117/12.312749
Show Author Affiliations
Ion N. Mihailescu, National Institute for Laser, Plasma, and Radiation Physics (Romania)
Eniko Gyorgy, National Institute for Laser, Plasma, and Radiation Physics (Romania)
Valentin S. Teodorescu, National Institute for Materials Physics (Romania)
Gheorghe Marin, National Institute for Laser, Plasma, and Radiation Physics (Romania)
D. Pantelica, National Institute for Physics and Nuclear Engineering Horia Hulubei (Romania)
A. Andrei, Institute of Nuclear Research (Romania)
Johny Neamtu, Univ. of Craiova (Romania)


Published in SPIE Proceedings Vol. 3405:
ROMOPTO '97: Fifth Conference on Optics

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