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Proceedings Paper

Characteristics of a carbon/nickel multilayer structure for soft x-ray optics deposited by rf magnetron sputtering
Author(s): Magdalena Ulmeanu; Geo Georgescu; Rares V. Medianu; Nicoleta Nastase; Cornel Ghica; Virgil V. Vasiliu
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Paper Abstract

In order to make X-ray-UV interference mirrors, we tried to obtain a periodic multilayer structure with thin films of two materials, a high absorption material (Ni) and a low absorption material (C) on a quartz substrate. We present theoretical approaches to determine the optimum values of the thicknesses of each thin film and the number of periods required for maximum reflectivity at normal incidence of a soft X-ray mirror working at (lambda) equals 50 angstroms. We also describe the experimental procedures used for obtaining the multilayer structure and the microscopically investigations.

Paper Details

Date Published: 2 July 1998
PDF: 6 pages
Proc. SPIE 3405, ROMOPTO '97: Fifth Conference on Optics, (2 July 1998); doi: 10.1117/12.312727
Show Author Affiliations
Magdalena Ulmeanu, National Institute for Laser, Plasma, and Radiation Physics (Romania)
Geo Georgescu, National Institute for Laser, Plasma, and Radiation Physics (Romania)
Rares V. Medianu, National Institute for Laser, Plasma, and Radiation Physics (Romania)
Nicoleta Nastase, National Institute for Microtechnology (Netherlands)
Cornel Ghica, National Institute for Materials Physics (Romania)
Virgil V. Vasiliu, National Institute for Laser, Plasma, and Radiation Physics (Romania)


Published in SPIE Proceedings Vol. 3405:
ROMOPTO '97: Fifth Conference on Optics
Valentin I. Vlad; Dan C. Dumitras, Editor(s)

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