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Proceedings Paper

Structure investigations of optical coatings on GaAs substrate
Author(s): Clementina A. Timus; Victor Rares Medianu; Rares V. Medianu; Geo Georgescu; Eugen Vasile
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Paper Abstract

ZnS, BaF2 and GaAs thin films on NaCl and GaAs substrates, produced by thermal evaporation and r.f. magnetron sputtering as antireflective and reflective coatings for 10.6 micrometers are investigated. Optical and electronic microscopy (TEM and SEM) with EDAX and SAED had been approached to study the structure and morphology of optical coatings, corroborated with the technological parameters of the deposition. The columnar structure of the thermally evaporated BaF2 film was observed. Uniformity and deposition rate for r.f. magnetron sputtering deposition, without ion assistance turns out to be very critical, since the induced mechanical stresses could compromise the optical film.

Paper Details

Date Published: 2 July 1998
PDF: 5 pages
Proc. SPIE 3405, ROMOPTO '97: Fifth Conference on Optics, (2 July 1998); doi: 10.1117/12.312726
Show Author Affiliations
Clementina A. Timus, National Institute for Laser, Plasma, and Radiation Physics (Romania)
Victor Rares Medianu, Institute of Atomic Physics (Romania)
Rares V. Medianu, National Institute for Laser, Plasma, and Radiation Physics (Romania)
Geo Georgescu, National Institute for Laser, Plasma, and Radiation Physics (Romania)
Eugen Vasile, METAV SA (Romania)

Published in SPIE Proceedings Vol. 3405:
ROMOPTO '97: Fifth Conference on Optics
Valentin I. Vlad; Dan C. Dumitras, Editor(s)

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