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Proceedings Paper

Interference devices for noncontact diagnostics of arbitrarily shaped rough surfaces
Author(s): Peter P. Maksimyak
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Paper Abstract

The relationship between statistical structure parameters of rough surface and associated correlation parameters of scattered field is used to develop a method for rough surface diagnostics. The treatment is based on the model of random phase object with inhomogeneity phase dispersion (sigma) 2qq(0) < 1. The proposed diagnostic methods are applicable to surfaces with roughness period comparable to the radiation wavelength employed, low-reflectance and arbitrarily shaped surfaces, and surfaces of a thin plane-parallel plate. The sensitivity limit of the methods in measuring the standard deviation of surface profile from base line is about 0.003 mm.

Paper Details

Date Published: 2 July 1998
PDF: 5 pages
Proc. SPIE 3405, ROMOPTO '97: Fifth Conference on Optics, (2 July 1998); doi: 10.1117/12.312707
Show Author Affiliations
Peter P. Maksimyak, Chernivtsy Univ. (Ukraine)


Published in SPIE Proceedings Vol. 3405:
ROMOPTO '97: Fifth Conference on Optics

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