Proceedings PaperInterference devices for noncontact diagnostics of arbitrarily shaped rough surfaces
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The relationship between statistical structure parameters of rough surface and associated correlation parameters of scattered field is used to develop a method for rough surface diagnostics. The treatment is based on the model of random phase object with inhomogeneity phase dispersion (sigma) 2qq(0) < 1. The proposed diagnostic methods are applicable to surfaces with roughness period comparable to the radiation wavelength employed, low-reflectance and arbitrarily shaped surfaces, and surfaces of a thin plane-parallel plate. The sensitivity limit of the methods in measuring the standard deviation of surface profile from base line is about 0.003 mm.