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Proceedings Paper

IR absorption of TiO2 thin films
Author(s): Marius D. Stamate; G. I. Rusu; Ioan Vascan
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Paper Abstract

The titanium oxide films were deposited on glass by reactive sputtering system, in different oxygen partial pressure. In this paper we present the IR absorption of TiOx thin films, deposited through a d.c. circular magnetron system. We found several common peaks of absorption located around 500 cm-1, 530 cm-1, 582 cm-1, 638 cm-1 and 800 cm-1 that are corresponding to Ti- Ox links energy.

Paper Details

Date Published: 2 July 1998
PDF: 4 pages
Proc. SPIE 3405, ROMOPTO '97: Fifth Conference on Optics, (2 July 1998); doi: 10.1117/12.312696
Show Author Affiliations
Marius D. Stamate, Bacau Univ. (Romania)
G. I. Rusu, Al. I. Cuza Univ. (Romania)
Ioan Vascan, Bacau Univ. (Romania)


Published in SPIE Proceedings Vol. 3405:
ROMOPTO '97: Fifth Conference on Optics
Valentin I. Vlad; Dan C. Dumitras, Editor(s)

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