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Proceedings Paper

Laser treatment of a-SiC:H thin films for optoelectronic applications
Author(s): D. Ghica; Niculae E. Mincu; Catrinel A. Stanciu; Gheorghe H. Dinescu; E. Aldea; Viorel Sandu; A. Andrei; Maria Dinescu; A. Ferrari; M. Balucani; G. Lamedica
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Paper Abstract

Amorphous and hydrogenated (a-SiC:H) as well as crystalline silicon carbide are widespread materials for optoelectronic applications. In this paper, we studied the effect of laser/RF plasma jet treatment of a-SiC:H thin films deposited by Plasma Enhanced Chemical Vapor Deposition, on Si wafers. A Nd:YAG laser ((lambda) equals 1.06 micrometers , tFWHM equals 14 ns, E0 equals 0.015 J/pulse) was used with a fluence of 4 mJ/cm2 incident on the sample, the number of pulses being varied. Plasma treatments were performed in a plasma jet generated by a capacity coupled RF discharge in N2. Different analysis techniques were used to investigate the films, before and after the irradiation: X-ray diffraction, X-ray photoelectron spectroscopy and transmission electron microscopy. We followed the modification of their structure and composition as an effect of the laser/plasma treatment. A comparison with the excimer and also with the RF treatments was performed.

Paper Details

Date Published: 2 July 1998
PDF: 6 pages
Proc. SPIE 3405, ROMOPTO '97: Fifth Conference on Optics, (2 July 1998); doi: 10.1117/12.312672
Show Author Affiliations
D. Ghica, Institute of Optoelectronics (Romania)
Niculae E. Mincu, Institute of Optoelectronics (United States)
Catrinel A. Stanciu, National Institute for Laser, Plasma, and Radiation Physics (Romania)
Gheorghe H. Dinescu, National Institute for Laser, Plasma, and Radiation Physics (Romania)
E. Aldea, National Institute for Laser, Plasma, and Radiation Physics (Romania)
Viorel Sandu, National Institute for Materials Physics (Romania)
A. Andrei, Institute for Nuclear Research (Romania)
Maria Dinescu, National Institute for Laser, Plasma, and Radiation Physics (Romania)
A. Ferrari, INFM and Univ. degli Studi di Roma La Sapienza (Italy)
M. Balucani, INFM and Univ. degli Studi di Roma La Sapienza (Italy)
G. Lamedica, INFM and Univ. degli Studi di Roma La Sapienza di Roma (Italy)


Published in SPIE Proceedings Vol. 3405:
ROMOPTO '97: Fifth Conference on Optics
Valentin I. Vlad; Dan C. Dumitras, Editor(s)

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