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Proceedings Paper

Process and performance optimization of bottom antireflective coatings
Author(s): Shuji Ding; Ping-Hung Lu; Jianhui Shan; Eleazar Gonzalez; Salem Mehtsun; Sunit S. Dixit; Dinesh N. Khanna
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Paper Abstract

AZTM BARLiTM II materials are used as highly absorptive bottom antireflective coatings (BARC) for i-line lithographic applications. The BARC formulations consist of polymer-bound dyes with the additives formulated in photoresist compatible solvents, containing none of monomeric chromophores, and showing excellent coating uniformity. We have continued to study the functional performance of the BARC materials on swing reduction, lithography, coating surface defect, thermal stability, forced aging behavior, etc. Strategy of formulations and recommendations on standard processing conditions will also be discussed.

Paper Details

Date Published: 29 June 1998
PDF: 10 pages
Proc. SPIE 3333, Advances in Resist Technology and Processing XV, (29 June 1998); doi: 10.1117/12.312480
Show Author Affiliations
Shuji Ding, Clariant Corp. (United States)
Ping-Hung Lu, Clariant Corp. (United States)
Jianhui Shan, Clariant Corp. (United States)
Eleazar Gonzalez, Clariant Corp. (United States)
Salem Mehtsun, Clariant Corp. (United States)
Sunit S. Dixit, Clariant Corp. (United States)
Dinesh N. Khanna, Clariant Corp. (United States)


Published in SPIE Proceedings Vol. 3333:
Advances in Resist Technology and Processing XV
Will Conley, Editor(s)

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