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Proceedings Paper

Contrast enhancement by alkali decomposable additives in quinonediazide-type positive resists
Author(s): Yasunori Uetani; Jun Tomioka; Hiroshi Moriuma; Yoshiko Miya
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Paper Abstract

We have developed the new contrast enhancement method using an alkali decomposable compound. This compound is hydrophobic and water insoluble, but decomposes to water soluble hydrophilic compounds by contact with alkaline developer. This solubility change makes high dissolution contrast between exposed and unexposed area. Good profiles are obtained by addition of this compound to quinonediazide type positive resist.

Paper Details

Date Published: 29 June 1998
PDF: 8 pages
Proc. SPIE 3333, Advances in Resist Technology and Processing XV, (29 June 1998); doi: 10.1117/12.312443
Show Author Affiliations
Yasunori Uetani, Sumitomo Chemical Co., Ltd. (Japan)
Jun Tomioka, Sumitomo Chemical Co., Ltd. (Japan)
Hiroshi Moriuma, Sumitomo Chemical Co., Ltd. (Japan)
Yoshiko Miya, Sumitomo Chemical Co., Ltd. (Japan)

Published in SPIE Proceedings Vol. 3333:
Advances in Resist Technology and Processing XV
Will Conley, Editor(s)

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