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Proceedings Paper

New design principle for the PACs of novolak resists
Author(s): Salil Jha; Arnost Reiser
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Paper Abstract

The inhibitor function and the photoreactive functions of the PACs of dissolution inhibition resists are independent of each other, and new PACs may be designed by joining strong inhibitors to conventional DNQs, provided the acceptor groups of the inhibitors are within reach of the thermal pulse emanating from the DNQ on exposure. The strength of inhibitors depends on the basicity of their acceptor groups, and that can be affected by substitution, by restructuring the acceptor group proper, and by increasing the size of the aromatic units attached to it.

Paper Details

Date Published: 29 June 1998
PDF: 8 pages
Proc. SPIE 3333, Advances in Resist Technology and Processing XV, (29 June 1998); doi: 10.1117/12.312440
Show Author Affiliations
Salil Jha, Polytechnic Univ. (United States)
Arnost Reiser, Polytechnic Univ. (United States)

Published in SPIE Proceedings Vol. 3333:
Advances in Resist Technology and Processing XV
Will Conley, Editor(s)

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