Share Email Print

Proceedings Paper

Techniques for the analysis of Cl- ion in TMAH
Author(s): Bang-Chein Ho; Mong-Ling Chang; Yu-Ping Lin
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Fabricating integrated circuits with increasingly smaller elements mandates that the chlorine ion contents in 2.38% TMAH to be under the 50 ppb level. Previously, the interference from TMAH inhibited the analysis of chlorine ion in TMAH by ion chromatography. In this study, we present a novel technique to eliminate the annoying interference from TMAH. By using of acid type cation exchange resin Amberite IR-120, the interference from TMA+ and OH- is successfully eliminated. The TMA+ cation is retained in the exchange resin and the OH- from TMAH neutralized with the H+ released from the resin. This relatively simple scheme of cation exchange preprocessing not only eliminates the influence of TMAH, but also possesses the additional merit that the Cl- anion has remained intact through the cation exchange resin. To further increase the detection limit, on-line preconcentration by ion chromatography has been coupled with the above scheme by cation exchange resin preprocessing, via this technique, the detection limit of sub 1 ppb level is achieved with no need of adding a standard.

Paper Details

Date Published: 29 June 1998
PDF: 16 pages
Proc. SPIE 3333, Advances in Resist Technology and Processing XV, (29 June 1998); doi: 10.1117/12.312436
Show Author Affiliations
Bang-Chein Ho, Industrial Technology Research Institute (Taiwan)
Mong-Ling Chang, Industrial Technology Research Institute (Taiwan)
Yu-Ping Lin, Industrial Technology Research Institute (Taiwan)

Published in SPIE Proceedings Vol. 3333:
Advances in Resist Technology and Processing XV
Will Conley, Editor(s)

© SPIE. Terms of Use
Back to Top