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Proceedings Paper

Development of a high-power TEA CO2 laser pumped by an all-solid state exciter and its application to new material processing
Author(s): Minoru Obara; Hiroyuki Yabe; Katsumi Midorikawa
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Paper Abstract

An average laser output power as high as 5 kW has been produced from a TEA CO2 laser pumped with a new solid state exciter. The exciter providing a 100 J transfer energy consisted of a high voltage pulse generator and a two stage magnetic pulse compressor. A sophisticated discharge head was equipped with the corona preionization with acoustic dampers. A maximum average laser power of 4.6 kW was attained at a repetition rate of 550 Hz with an overall efficiency as high as 10.5%. A maximum repetition rate achieved was 1.1 kHz, at which the corresponding laser output was 3.4 kW. New TEA CO2 laser applications to material processing include organic material ablation, semiconductor material ablation, ceramic ablations and aluminum conductor line writing on aluminum nitride ceramic.

Paper Details

Date Published: 29 June 1998
PDF: 7 pages
Proc. SPIE 3403, International Conference on Atomic and Molecular Pulsed Lasers II, (29 June 1998); doi: 10.1117/12.311964
Show Author Affiliations
Minoru Obara, Keio Univ. (Japan)
Hiroyuki Yabe, Keio Univ. (Japan)
Katsumi Midorikawa, RIKEN--The Institute of Physical and Chemical Research (Japan)

Published in SPIE Proceedings Vol. 3403:
International Conference on Atomic and Molecular Pulsed Lasers II
Victor F. Tarasenko; Georgy V. Mayer; Gueorgii G. Petrash, Editor(s)

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