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Proceedings Paper

Characteristics of heater film for ink-jet printhead
Author(s): Sao-Ling Chiu; DongSing Wuu; Yi-Yung Wu
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Paper Abstract

In a thermal bubble inkjet printhead, thin film resistor plays the most important role. The thin film resistor must fire about 1 billion times during the device operation. During firing, temperatures are up to 400 degrees Celsius and the duration is on the order of microseconds. In this situation, the resistance stability and mechanical property of the thin film resistor are critical for fabrication. In this study, resistivity and stress behavior related to a wild range of Ta- Al compositions are examined.

Paper Details

Date Published: 18 June 1998
PDF: 8 pages
Proc. SPIE 3422, Input/Output and Imaging Technologies, (18 June 1998); doi: 10.1117/12.311104
Show Author Affiliations
Sao-Ling Chiu, Industrial Technology Research Institute (Taiwan)
DongSing Wuu, Da-Yeh Univ. (Taiwan)
Yi-Yung Wu, Industrial Technology Research Institute (Taiwan)

Published in SPIE Proceedings Vol. 3422:
Input/Output and Imaging Technologies
Yusheng Tim Tsai; Teh-Ming Kung; Jan Larsen, Editor(s)

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