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Proceedings Paper

Inspecting the microprofile and defects of optical surfaces using an atomic-force microscope
Author(s): Jianbai Li; Shaorong Xiao; Anging Zhuo; Dacheng Li
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Paper Abstract

In this paper, an Atomic Force Microscope (AFM) with laser lever and its application inspecting microprofile of optical surface are presented. The nanometer-grade defects in optical and supersmooth surface can be tested by AFM. The microprofile drawings have the accuracy higher than (0.1 - 1 nm) in both vertical and lateral resolution. Some testing results of optical and supersmooth surfaces are shown in the paper.

Paper Details

Date Published: 18 June 1998
PDF: 4 pages
Proc. SPIE 3422, Input/Output and Imaging Technologies, (18 June 1998); doi: 10.1117/12.311095
Show Author Affiliations
Jianbai Li, Jiangxi Academy of Sciences (China)
Shaorong Xiao, Nanchang Univ. (China)
Anging Zhuo, Jiangxi Academy of Sciences (China)
Dacheng Li, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 3422:
Input/Output and Imaging Technologies
Yusheng Tim Tsai; Teh-Ming Kung; Jan Larsen, Editor(s)

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