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Proceedings Paper

TFT laser annealing systems in industrial production processes
Author(s): Burkhard Fechner
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Paper Abstract

As the use of TFT flat panels in today's technology is rapidly increasing, there is further need for advanced production processing. New such systems have to fulfill multiple tasks combining latest research data with manufacturing requirements. Improvements in laser technology as lifetime extension of components and reduction of energy fluctuations have led to the acceptance of these new manufacturing devices on the production floor. Additionally 'state of the art' optics and handling units were introduced to fulfill the industrial demands.

Paper Details

Date Published: 17 June 1998
PDF: 3 pages
Proc. SPIE 3421, Display Technologies II, (17 June 1998); doi: 10.1117/12.311066
Show Author Affiliations
Burkhard Fechner, Lambda Physik Japan (Japan)

Published in SPIE Proceedings Vol. 3421:
Display Technologies II
Fang-Chen Luo; Shin-Tson Wu; Shunsuke Kobayashi, Editor(s)

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