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Proceedings Paper

Precise automatic alignment of a pinhole integrated with photodiodes
Author(s): Minoru Sasaki; Yuji Arai; Wataru Kamada; Kazuhiro Hane
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Paper Abstract

The spatial filter of a Si micromachined pinhole integrated with photodiodes is fabricated. The photodiode cells placed around the center pinhole can detect the relative position between the incident beam spot and the pinhole. In our previous study, the automatic alignment of the pinhole realized the accuracy of 1 micrometers using the feedback control based on the obtained position signal. To increase the alignment accuracy, the suitable design of the pinhole and the photodiode cell is necessary, since it decides the sensitivity to the laser spot position. The sensitivity is examined changing the separation length between the photodiode cells.

Paper Details

Date Published: 22 June 1998
PDF: 0 pages
Proc. SPIE 3419, Optoelectronic Materials and Devices, 34191D (22 June 1998); doi: 10.1117/12.311035
Show Author Affiliations
Minoru Sasaki, Tohoku Univ. (Japan)
Yuji Arai, Tohoku Univ. (Japan)
Wataru Kamada, Tohoku Univ. (Japan)
Kazuhiro Hane, Tohoku Univ. (Japan)


Published in SPIE Proceedings Vol. 3419:
Optoelectronic Materials and Devices
Marek Osinski; Yan-Kuin Su, Editor(s)

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