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Proceedings Paper

Performance evaluation of a lead-titanate (PbTiO3) pyroelectric thin-film infrared sensor with temperature isolation improvement structure by microelectromechanical system (MEMS) technologies
Author(s): Jyh-Jier Ho; Yuen Keun Fang; Chin-Ying Chen; G. S. Chen; M. S. Ju
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Paper Abstract

An IR sensor with the lead-titanate thin-film using the technology of micro-electro-mechanical systems to achieve a better thermal isolation structure has been fabricated and developed. The major IR-sensing part on the cantilever beam with dimensions of 200 X 100 X 2 micrometers 3 consists of a 500-angstrom lead-titanate layer deposited by RF sputtering, and an evaporated bismuth layer. This thermal isolation improved structure exhibits a much superior performance to that of a traditional IR-sensing bulk structure on the experimental results, which show a 200 percent and 300 percent improvement in current gain under the incident optical power 500 (mu) W and 6V applied bias at room temperature and 77 degrees K, respectively.

Paper Details

Date Published: 22 June 1998
PDF: 0 pages
Proc. SPIE 3419, Optoelectronic Materials and Devices, 34190U (22 June 1998); doi: 10.1117/12.311014
Show Author Affiliations
Jyh-Jier Ho, Fortune Junior College of Technology & Commerce (Taiwan)
Yuen Keun Fang, National Cheng Kung Univ. (Taiwan)
Chin-Ying Chen, Fortune Junior College of Technology & Commerce (Taiwan)
G. S. Chen, National Cheng Kung Univ. (Taiwan)
M. S. Ju, National Cheng Kung Univ. (Taiwan)

Published in SPIE Proceedings Vol. 3419:
Optoelectronic Materials and Devices
Marek Osinski; Yan-Kuin Su, Editor(s)

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