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Proceedings Paper

Multilayer optics for x-ray and gamma radiation
Author(s): S. S. Andreev; Sergey V. Gaponov; Nikolai N. Salashchenko; E. A. Shamov; Leonid A. Shmaenok; Sergei V. Bobashev; Dmitrii M. Simanovski; Eugene N. Ragozin
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Paper Abstract

We report the experimental results on production of multilayer soft x-ray and EUV mirrors and their application in x-ray spectroscopy and fluorescence analysis, as well as for development of EUV lithographic and x-ray microscopic devices and soft x-ray point sources. The problem of the production and the investigation of short-period x-ray multilayers and multilayer (gamma) -filters is discussed.

Paper Details

Date Published: 25 June 1998
PDF: 25 pages
Proc. SPIE 3406, Current Russian Research in Optics and Photonics: New Methods and Instruments for Space- and Earth-based Spectroscopy in XUV, UV, IR, and Millimeter Waves, (25 June 1998); doi: 10.1117/12.310983
Show Author Affiliations
S. S. Andreev, Institute for Physics of Microstructures (Russia)
Sergey V. Gaponov, Institute for Physics of Microstructures (Russia)
Nikolai N. Salashchenko, Institute for Physics of Microstructures (Russia)
E. A. Shamov, Institute for Physics of Microstructures (Russia)
Leonid A. Shmaenok, A.F. Ioffe Physico-Technical Institute (Russia) and Institute for Plasma Physics (Netherlands)
Sergei V. Bobashev, A.F. Ioffe Physico-Technical Institute (Russia)
Dmitrii M. Simanovski, A.F. Ioffe Physico-Technical Institute (Russia)
Eugene N. Ragozin, P.N. Lebedev Physics Institute (Russia)


Published in SPIE Proceedings Vol. 3406:
Current Russian Research in Optics and Photonics: New Methods and Instruments for Space- and Earth-based Spectroscopy in XUV, UV, IR, and Millimeter Waves
Igor I. Sobelman; Vladimir A. Slemzin, Editor(s)

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