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Proceedings Paper

Thermochemical technology of the layer-by-layer synthesis of multilevel chromium masks as precision molds for the phase shaping of high-efficiency large-aperture lenses
Author(s): Valery P. Kiryanov; Alexander G. Verkhogliad; Leonid B. Kastorsky; Alexey V. Kiryanov; Vladimir I. Kozlov
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Paper Abstract

The new technology of the high-efficient large-aperture multilevel diffractive optical elements manufacture is examined. This technology is based on the properties of the laser thermochemical writing of hidden images in chromium films and possibilities of the circular laser photoplotter CLWS-300. The ultra-high resolution interferometric method is used for the hidden image precision alignment.

Paper Details

Date Published: 18 June 1998
PDF: 6 pages
Proc. SPIE 3291, Diffractive and Holographic Device Technologies and Applications V, (18 June 1998); doi: 10.1117/12.310590
Show Author Affiliations
Valery P. Kiryanov, Technological Design Institute of Scientific Instrument Engineering (Russia)
Alexander G. Verkhogliad, Technological Design Institute of Scientific Instrument Engineering (Russia)
Leonid B. Kastorsky, Technological Design Institute of Scientific Instrument Engineering (Russia)
Alexey V. Kiryanov, Technological Design Institute of Scientific Instrument Engineering (Russia)
Vladimir I. Kozlov, Technological Design Institute of Scientific Instrument (Russia)


Published in SPIE Proceedings Vol. 3291:
Diffractive and Holographic Device Technologies and Applications V
Ivan Cindrich; Sing H. Lee, Editor(s)

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