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Proceedings Paper

X-ray stepper development for volume production at Canon
Author(s): Kouji Uda; Nobutoshi Mizusawa; Yutaka Tanaka; Yutaka Watanabe; Hideki Ina; Shunichi Uzawa
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Paper Abstract

We describe some results of exposure experiments using the present prototype SR stepper which Canon has developed and the novel technology development which is necessary to establish the next generation SR stepper for volume production. Concerning the technology development, we have established (1) two mirror condensing system for full field exposure, (2) ADGL alignment method, (3) magnification correction method, (4) high speed stage stepping method. By adopting these technologies, we have been developing a beta- site machine for volume production and its features and preliminary specifications are described.

Paper Details

Date Published: 5 June 1998
PDF: 9 pages
Proc. SPIE 3331, Emerging Lithographic Technologies II, (5 June 1998); doi: 10.1117/12.309632
Show Author Affiliations
Kouji Uda, Canon Inc. (Japan)
Nobutoshi Mizusawa, Canon Inc. (Japan)
Yutaka Tanaka, Canon Inc. (Japan)
Yutaka Watanabe, Canon Inc. (Japan)
Hideki Ina, Canon Inc. (Japan)
Shunichi Uzawa, Canon Inc. (Japan)

Published in SPIE Proceedings Vol. 3331:
Emerging Lithographic Technologies II
Yuli Vladimirsky, Editor(s)

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