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Proceedings Paper

Scattering from normal-incidence EUV optics
Author(s): Eric M. Gullikson
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Paper Abstract

Measurements of nonspecular EUV scattering from Mo/Si multilayer coated mirrors have been performed. The surface power spectral density is deduced from the angular scattering distribution and in all cases is found to be in excellent agreement with surface profile measurements, by both optical and atomic force microscopy. It is demonstrated that the effects of scatter on the EUV imaging performance of a single normal incidence optic are accurately predicted from surface profile measurements.

Paper Details

Date Published: 5 June 1998
PDF: 9 pages
Proc. SPIE 3331, Emerging Lithographic Technologies II, (5 June 1998); doi: 10.1117/12.309625
Show Author Affiliations
Eric M. Gullikson, Lawrence Berkeley National Lab. (United States)


Published in SPIE Proceedings Vol. 3331:
Emerging Lithographic Technologies II
Yuli Vladimirsky, Editor(s)

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