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Proceedings Paper

400- and 750-MHz one- and two-dimensional nuclear magnetic resonance spectra of x-ray-degraded poly(methyl methacrylate): comparison with UV-degraded material
Author(s): Edward E. Waali; John D. Scott; Olga Vladimirsky; Yuli Vladimirsky; K. M. Hayataka; J. Michael Klopf
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Paper Abstract

Nuclear magnetic resonance spectroscopy (NMR) has been sued for he identification of several products from syndiotactic- rich poly(methyl methacrylate) (PMMA) sheet exposed to x-ray and UV irradiation. Two chain-scission products and two chain-intact products were observed using 1D and 2D NMR spectroscopy. The 750 and 400 MHz 1D hydrogen (1H) spectrum and the 2D 1H, 1H-COSY, 1HMQC1 and HMBC1 spectra permitted the assignment of many hydrogen and carbon NMR signals for the four products which are still polymeric. Additional signals were observed for minor stereoisomers. Methyl formate, s small molecular product, was found in both the x-ray and UV degradations. Acetaldehyde was also observed from x-ray exposure but not UV exposure. Important results from this work are well- resolved chemical 'fingerprints' for x-ray and UV exposed PMMA.

Paper Details

Date Published: 5 June 1998
PDF: 7 pages
Proc. SPIE 3331, Emerging Lithographic Technologies II, (5 June 1998); doi: 10.1117/12.309609
Show Author Affiliations
Edward E. Waali, Univ. of Montana (United States)
John D. Scott, Louisiana State Univ. (United States)
Olga Vladimirsky, Ctr. for X-ray Lithography/Univ. of Wisconsin-Madison (United States)
Yuli Vladimirsky, Ctr. for X-ray Lithography/Univ. of Wisconsin-Madison (United States)
K. M. Hayataka, Univ. of Montana (United States)
J. Michael Klopf, Louisiana State Univ. (United States)


Published in SPIE Proceedings Vol. 3331:
Emerging Lithographic Technologies II
Yuli Vladimirsky, Editor(s)

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