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Proceedings Paper

Diagnostic techniques for excimer beams used in a-Si annealing for flat panel displays
Author(s): Gary T. Forrest
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Paper Abstract

Laser annealing of a-Si to form p-Si LCD panels requires precise control of the annealing beam shape and scan overlap. Three methods are presented for determining the annealed quality of a-Si LCD panels. The first tests the laser beam directly by using polymer coated 8 X 10 inch SensorCards. The second allows live viewing of the beam in real time with a fluorescent glass. The third looks directly at the optical properties of the annealed a-Si to infer eventual electrical properties.

Paper Details

Date Published: 3 June 1998
PDF: 6 pages
Proc. SPIE 3274, Laser Applications in Microelectronic and Optoelectronic Manufacturing III, (3 June 1998); doi: 10.1117/12.309527
Show Author Affiliations
Gary T. Forrest, SensorPhysics, Inc. (United States)


Published in SPIE Proceedings Vol. 3274:
Laser Applications in Microelectronic and Optoelectronic Manufacturing III
Jan J. Dubowski; Peter E. Dyer, Editor(s)

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