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Proceedings Paper

New developments of pulsed-laser deposition process
Author(s): Tatsuo Okada; Yoshiki Nakata; Junichi Muramoto; Mitsuo Maeda
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Paper Abstract

This paper describes the studies on nanoparticle synthesis process by the laser ablation in a background gas and the metal film deposition by the laser-induced forward transfer (LIFT) technique. In order to understand and control the processes, an imaging diagnostic system has been developed. Firstly, the behavior of nanoparticles in a laser ablation plume was studied with the imaging system. The attempt to control the nanoparticle behavior was examined. Next, the metal film deposition by the LIFT technique was studied with the different laser-pulse duration from 160 fs to 60 ms. The results are reported along with the imaging observation of the LIFT process.

Paper Details

Date Published: 3 June 1998
PDF: 9 pages
Proc. SPIE 3274, Laser Applications in Microelectronic and Optoelectronic Manufacturing III, (3 June 1998); doi: 10.1117/12.309518
Show Author Affiliations
Tatsuo Okada, Kyushu Univ. (Japan)
Yoshiki Nakata, Kyushu Univ. (Japan)
Junichi Muramoto, Kyushu Univ. (Japan)
Mitsuo Maeda, Kyushu Univ. (Japan)


Published in SPIE Proceedings Vol. 3274:
Laser Applications in Microelectronic and Optoelectronic Manufacturing III
Jan J. Dubowski; Peter E. Dyer, Editor(s)

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