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Proceedings Paper

Manufacture of miniature bioparticle electromanipulators by excimer laser ablation
Author(s): Malcolm C. Gower; Erol C. Harvey; Nadeem Hasan Rizvi; Phil T. Rumsby; Julian P.H. Burt; Mark S. Talary; John A. Tame; Ron Pethig
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Paper Abstract

Multilevel microelectrode structures have been produced using excimer laser ablation techniques to obtain devices for the electro-manipulation of bioparticles using traveling electric field dielectrophoresis effects. The system used to make these devices operates with a krypton fluoride excimer laser at a wavelength of 248 nm and with a repetition rate of 100 Hz. The laser illuminates a chrome-on-quartz mask which contains the patterns for the particular electrode structure being made. The mask is imaged by a high- resolution lens onto the sample. Large areas of the mask pattern are transferred to the sample by using synchronized scanning of the mask and workpiece with sub-micron precision. Electrode structures with typical sizes of approximately 10 micrometers are produced and a multi-level device is built up by ablation of electrode patterns and layered insulators. To produce a traveling electric field suitable for the manipulation of bioparticles, a linear array of 10 micrometers by 200 micrometers microelectrodes, placed at 20 micrometers intervals, is used. The electric field is created by energizing each electrode with a sinusoidal voltage 90 degree(s) out of phase with that applied to the adjacent electrode. On exposure to the traveling electric field, bioparticles become electrically polarized and experience a linear force and so move along the length of the linear electrode array. The speed and direction of the particles is controlled by the magnitude and frequency of the energizing signals. Such electromanipulation devices have potential uses in a wide range of biotechnological diagnostic and processing applications. Details of the overall laser projection system are presented together with data on the devices which have been manufactured so far.

Paper Details

Date Published: 3 June 1998
PDF: 9 pages
Proc. SPIE 3274, Laser Applications in Microelectronic and Optoelectronic Manufacturing III, (3 June 1998); doi: 10.1117/12.309510
Show Author Affiliations
Malcolm C. Gower, Exitech Ltd. (United Kingdom)
Erol C. Harvey, Exitech Ltd. (Australia)
Nadeem Hasan Rizvi, Exitech Ltd. (United Kingdom)
Phil T. Rumsby, Exitech Ltd. (United Kingdom)
Julian P.H. Burt, Univ. of Wales Bangor (United Kingdom)
Mark S. Talary, Univ. of Wales Bangor (United States)
John A. Tame, Univ. of Wales Bangor (United Kingdom)
Ron Pethig, Univ. of Wales Bangor (United States)


Published in SPIE Proceedings Vol. 3274:
Laser Applications in Microelectronic and Optoelectronic Manufacturing III
Jan J. Dubowski; Peter E. Dyer, Editor(s)

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