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Proceedings Paper

Femtosecond lasers and their implications for materials processing
Author(s): Paul B. Corkum
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Paper Abstract

As a result of rapid engineering progress, femtosecond lasers will soon be available for industrial applications such as micro machining. I will review the physics behind laser machining of metals, semiconductors and transparent materials. Then I will briefly discuss the current state-of- the-art in femtosecond laser technology of interest to micro machining.

Paper Details

Date Published: 3 June 1998
PDF: 8 pages
Proc. SPIE 3274, Laser Applications in Microelectronic and Optoelectronic Manufacturing III, (3 June 1998); doi: 10.1117/12.309498
Show Author Affiliations
Paul B. Corkum, National Research Council of Canada (Canada)


Published in SPIE Proceedings Vol. 3274:
Laser Applications in Microelectronic and Optoelectronic Manufacturing III
Jan J. Dubowski; Peter E. Dyer, Editor(s)

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