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Proceedings Paper

Miniaturized focusing fan-out elements: design, fabrication, and characterization
Author(s): Andreas Schilling; Philippe Nussbaum; Christian Ossmann; Silke Traut; Markus Rossi; Helmut Schift; Hans Peter Herzig
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Paper Abstract

Fan—out phase gratings are micro—optical elements vhicli split an incoming beani into au arra of light beanis with equal power. whereas the diffracted beams are focused by a Fourie-transforin lens. These elements are used. for example. iii optical iiitercoiuiects. in multidetector systems. and in parallel optical processing [ I I. We present different concepts for the fabrication of lwbrid elements which combine the faii-out and focusing function. The combination of the refractive and diffractive function results in a monolithic element with miniaturized dimensions and has therefore a high potential for applications in optical microsystems. To achieve this functionality. we used two different designs and different fabrication technologies. The hybrid elements were fabricated by injection moulding. double-sided photolithographv. and direct laser writing. Single elements as well as large arrays of elements have been fabricated.

Paper Details

Date Published: 22 May 1998
PDF: 3 pages
Proc. SPIE 3490, Optics in Computing '98, (22 May 1998); doi: 10.1117/12.308971
Show Author Affiliations
Andreas Schilling, Institut de Microtechnique (Switzerland)
Philippe Nussbaum, Institut de Microtechnique (Switzerland)
Christian Ossmann, Institut de Microtechnique (Switzerland)
Silke Traut, Institut de Microtechnique (Switzerland)
Markus Rossi, Ctr. Suisse d'Electronique et de Microtechnique SA (Switzerland)
Helmut Schift, Paul Scherrer Institute Villigen (Switzerland)
Hans Peter Herzig, Institut de Microtechnique (Switzerland)

Published in SPIE Proceedings Vol. 3490:
Optics in Computing '98
Pierre H. Chavel; David A. B. Miller; Hugo Thienpont, Editor(s)

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