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Proceedings Paper

SEM image sharpening by reversing the effect of a nonideal beam spot
Author(s): Yaron I. Gold; Alex Goldenshtein
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Paper Abstract

This paper presents a method for increasing the contrast-to- noise ratio and spatial resolution of SEM images. The method uses de-convolution to eliminate the blur caused by an electron beam spot that covers more than a single pixel. An approximating de-convolution algorithm with low computational complexity is also shown.

Paper Details

Date Published: 8 June 1998
PDF: 5 pages
Proc. SPIE 3332, Metrology, Inspection, and Process Control for Microlithography XII, (8 June 1998); doi: 10.1117/12.308774
Show Author Affiliations
Yaron I. Gold, Applied Materials,Inc./Opal (Israel)
Alex Goldenshtein, Applied Materials,Inc./Opal (Israel)

Published in SPIE Proceedings Vol. 3332:
Metrology, Inspection, and Process Control for Microlithography XII
Bhanwar Singh, Editor(s)

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