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Proceedings Paper

Scanning force microscope using point diffraction interferometer
Author(s): Xu-Dong Mou; Yifeng You; Yongmo Zhuo; Yongying Yang; Ming Xu
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Paper Abstract

A new optical interferometer suitable for the scanning force microscope is presented in this paper. The cantilever itself is used as a micro interferometer element. The deflection of the cantilever is detected by the interference between the geometrical reflected wave and the backward diffracted wave. This interferometer has a very simple structure, fewer optical components, lower cost, and complete common light path. 0.01 nm vertical resolution is gotten by this instrument.

Paper Details

Date Published: 8 June 1998
PDF: 6 pages
Proc. SPIE 3332, Metrology, Inspection, and Process Control for Microlithography XII, (8 June 1998); doi: 10.1117/12.308755
Show Author Affiliations
Xu-Dong Mou, Zhejiang Univ. (China)
Yifeng You, Zhejiang Univ. (China)
Yongmo Zhuo, Zhejiang Univ. (China)
Yongying Yang, Zhejiang Univ. (China)
Ming Xu, Zhejiang Univ. (China)


Published in SPIE Proceedings Vol. 3332:
Metrology, Inspection, and Process Control for Microlithography XII
Bhanwar Singh, Editor(s)

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