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Proceedings Paper

Thin carbon nitride films deposited by laser ablation with an XeCl excimer laser
Author(s): Armando Luches; Emilia D'Anna; Gilberto Leggieri; Maurizio Martino; Alessio Perrone; Guiseppe Majni; Paolo Mengucci; Eniko Gyorgy; Ion N. Mihailescu; Mihai A. Popescu
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Paper Abstract

Carbon nitride films were deposited on <111> Si substrates by pulsed laser ablation of graphite targets in low pressure (1 - 50 Pa) N2 atmosphere. The irradiations were performed with an XeCl excimer laser at the fluences of 12 and 16 J/cm2. Many different diagnostic techniques (SEM, RBS, XPS, XRD, TEM) have been applied to characterize the deposited layers. The deposition rate decreases with increasing ambient pressure. The N/C atomic ratio into the deposited films generally increases with increasing ambient pressure and laser fluence. N/C values up to 0.7 were inferred from the RBS spectra. There are evidences of the formation of quite large crystals, which have grown almost epitaxially on the <111> Si substrate. Heating of the substrates during depositions causes a reduction of the N/C ratio. Optical emission spectra of the laser plasma plume have been recorded and analyzed, to try to correlate plasma characteristics with the composition of the deposited films.

Paper Details

Date Published: 26 May 1998
PDF: 8 pages
Proc. SPIE 3404, ALT'97 International Conference on Laser Surface Processing, (26 May 1998); doi: 10.1117/12.308600
Show Author Affiliations
Armando Luches, Univ. degli Studi di Lecce and Istituto Nazionale di Fisica della Materia (Italy)
Emilia D'Anna, Univ. degli Studi di Lecce and Istituto Nazionale di Fisica della Materia (Italy)
Gilberto Leggieri, Univ. degli Studi di Lecce and Istituto Nazionale di Fisica della Materia (Italy)
Maurizio Martino, Univ. degli Studi di Lecce and Istituto Nazionale di Fisica della Materia (Italy)
Alessio Perrone, Univ. degli Studi di Lecce and Istituto di Fisica della Materia (Italy)
Guiseppe Majni, Univ. degli Studi di Ancona (Italy)
Paolo Mengucci, Univ. degli Studi di Ancona (Italy)
Eniko Gyorgy, National Institute for Laser, Plasma and Radiation Physics (Romania)
Ion N. Mihailescu, National Institute for Laser, Plasma and Radiation Physics (Romania)
Mihai A. Popescu, National Institute for Laser, Plasma and Radiation Physics (Romania)


Published in SPIE Proceedings Vol. 3404:
ALT'97 International Conference on Laser Surface Processing
Vladimir I. Pustovoy, Editor(s)

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