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Proceedings Paper

Resonator using polarization beamsplitter prism for microlithography KrF excimer laser
Author(s): Keiichiro Yamanaka; Yuji Hashidate; Hidemi Takahashi; Nobuaki Furuya
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Paper Abstract

We discuss a new resonator design for sub-pm bandwidth (FWHM) KrF excimer laser using an etalon, a grating and prisms. This resonator uses a polarization beam splitter prism (PBSP) which has both functions of splitting polarized beam and beam expansion to reduce the resonator length. In our experiments, the output power is improved 29.4% by using PBSP in comparison with the conventional method, while the bandwidth (FWHM) is reduced from less than 0.9 pm to less than 0.6 pm at the same time. A calculation has been done to confirm the output power dependence on the resonator length and the loss of optics. Its result explains our experimental results approximately. We demonstrated that PBSP has a significant effect to improve the output power of the narrow bandwidth KrF excimer laser that would result in the extension of chamber lifetime. Furthermore, this technique will help the development of the band narrowing excimer laser for microlithography.

Paper Details

Date Published: 13 May 1998
PDF: 8 pages
Proc. SPIE 3267, Laser Resonators, (13 May 1998); doi: 10.1117/12.308119
Show Author Affiliations
Keiichiro Yamanaka, Matsushita Research Institute Tokyo, Inc. (Japan)
Yuji Hashidate, Matsushita Research Institute, Tokyo Inc. (Japan)
Hidemi Takahashi, Matsushita Research Institute Tokyo, Inc. (Japan)
Nobuaki Furuya, Matsushita Research Institute Tokyo, Inc. (Japan)

Published in SPIE Proceedings Vol. 3267:
Laser Resonators
Alexis V. Kudryashov; Pierre Galarneau, Editor(s)

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