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Proceedings Paper

Fluoride thin films for reflective coatings at 157 nm
Author(s): Ronald L. J. Cowell
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Paper Abstract

An overview of the excimer laser market shows the trend towards shorter operating wavelengths. The optical properties of vacuum ultraviolet materials are described and the design of a reflective fluoride multilayer coating for 157 nm is given. Practical considerations and techniques used for the coating manufacture are discussed. Results on coating performance and film properties are presented. Finally, a summary reviews the relevant aspects and salient points encountered during the project with an indication of the direction of any subsequent follow-up work.

Paper Details

Date Published: 12 May 1998
PDF: 6 pages
Proc. SPIE 3268, Gas and Chemical Lasers and Intense Beam Applications, (12 May 1998); doi: 10.1117/12.308091
Show Author Affiliations
Ronald L. J. Cowell, SLS Optics Ltd. (United Kingdom)

Published in SPIE Proceedings Vol. 3268:
Gas and Chemical Lasers and Intense Beam Applications
Ernest A. Dorko; Jeffrey L. Moler, Editor(s)

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