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Proceedings Paper

Miniature uncooled infrared sensitive detectors for in-vivo biomedical applications
Author(s): Panos G. Datskos; Stavros G. Demos; Slobodan Rajic
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Paper Abstract

Broadband IR radiation detectors have been developed using miniature, inexpensive, mass produced microcantilevers capable of detecting temperature differences as small as 10-6 K. Microcantilevers made out of semiconductor materials with dimensions of 50 to 200 micrometers long, 10 to 30 micrometers wide and 0.4 to 4 micrometers thick, undergo bending when exposed to IR radiation and can be used either as uncooled photon or thermal detectors. Mounted on a probe 1 mm in diameter a number of microcantilevers can be accommodated in the working channel of existing endoscopes for in vivo proximity focus measurements inside the human body.

Paper Details

Date Published: 1 May 1998
PDF: 7 pages
Proc. SPIE 3253, Biomedical Sensing and Imaging Technologies, (1 May 1998); doi: 10.1117/12.308020
Show Author Affiliations
Panos G. Datskos, Univ. of Tennessee and Oak Ridge National Lab. (United States)
Stavros G. Demos, Lawrence Livermore National Lab. (United States)
Slobodan Rajic, Oak Ridge National Lab. (United States)


Published in SPIE Proceedings Vol. 3253:
Biomedical Sensing and Imaging Technologies
Robert A. Lieberman; Tuan Vo-Dinh, Editor(s)

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