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Proceedings Paper

Photoacoustic techniques for determination of thresholds of failure during laser processing of substrate materials for integrated electronics
Author(s): Sergiy M. Baschenko; Ivan V. Blonskij; Viacheslav M. Puzikov; Oleg Ya. Dan'ko; Alexander G. Filin
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Paper Abstract

Possibility of application of the photoacoustic methods for determination of threshold of failure of plates caused by power light pulses (up to 300 MW/mm2) of the excimer XeCl* laser is demonstrated. The original system on the basis of the XeCl* laser for a high-precision processing of sapphire plates and other construction materials is developed.

Paper Details

Date Published: 20 April 1998
PDF: 4 pages
Proc. SPIE 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997, (20 April 1998); doi: 10.1117/12.306272
Show Author Affiliations
Sergiy M. Baschenko, Institute of Physics (Ukraine)
Ivan V. Blonskij, Institute of Physics (Ukraine)
Viacheslav M. Puzikov, Institute for Single Crystals (Ukraine)
Oleg Ya. Dan'ko, Institute for Single Crystals (Ukraine)
Alexander G. Filin, Institute for Single Crystals (Ukraine)


Published in SPIE Proceedings Vol. 3359:
Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997
Sergey V. Svechnikov; Mikhail Ya. Valakh, Editor(s)

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