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Proceedings Paper

Methods and devices for check-up of content of contamination in liquid media with low absorbability
Author(s): Olexander I. Bilyi; Vasyl B. Getman; Yaroslav P. Ferensovich; T. V. Tetyuk; A. K. Chkolnyi
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Paper Abstract

The demands of purity of liquid media with low absorbability such as photoresist used in microelectronics production of light oil-products are enhanced at present. Particular attention is given to developing of methods and devices for estimation of liquid purity. In this report the methods and the analyzers, developed at Applied Physics Institute of Ivan Franko State University, intended for checking the content of the microparticles larger than 0.3 micrometers in liquid photoresist or light oil-products are considered.

Paper Details

Date Published: 20 April 1998
PDF: 4 pages
Proc. SPIE 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997, (20 April 1998); doi: 10.1117/12.306267
Show Author Affiliations
Olexander I. Bilyi, Ivan Franko State Univ. (Ukraine)
Vasyl B. Getman, Ivan Franko State Univ. (Ukraine)
Yaroslav P. Ferensovich, Ivan Franko State Univ. (Ukraine)
T. V. Tetyuk, Ivan Franko State Univ. (Ukraine)
A. K. Chkolnyi, AS Rodon (Ukraine)


Published in SPIE Proceedings Vol. 3359:
Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997

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