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Proceedings Paper

Random error behavior for rotating-analyzer ellipsometers
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Paper Abstract

The article gives a new approach for the consideration of the precision reachable by rotating-analyzer ellipsometers. Presented results approve all qualitative conclusions of the previous article on this topic, but the general equations and numerical results are different. Additionally this article treats the problem of optimizing the measurements of ellipsometric angles separately. It is shown, measured (Psi) and (Delta) are correlated for such type of ellipsometers. For most real in practice short-noise-limited case a good rule of thumb is proposed, which gives the compromise for suboptimize measurements as (rho) , so (Psi) and (Delta) at the same time. It is proved, as all sources of noise work simultaneously, as well as for null-ellipsometry it is impossible to make measurements at the Brewster angle with rotating-analyzer ellipsometers.

Paper Details

Date Published: 20 April 1998
PDF: 11 pages
Proc. SPIE 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997, (20 April 1998); doi: 10.1117/12.306258
Show Author Affiliations
Eugene G. Bortchagovsky, Institute of Semiconductor Physics (Ukraine)


Published in SPIE Proceedings Vol. 3359:
Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997
Sergey V. Svechnikov; Mikhail Ya. Valakh, Editor(s)

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