Share Email Print
cover

Proceedings Paper

Cryogenic spectrometric ellipsometer for studying solid state optical properties
Author(s): Alla I. Belyaeva; T. G. Grebennik
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Cryogenic spectrometric ellipsometer (CSE) for studding solid state optical properties was developed. CSE permits determination of the optical constants of solid in the range between 0.3 and 2 micron, in temperature interval from 5 up to 300 K. CSE is used for bulk samples characterization and thin films including multilayers stacks analysis (refractive indices and absorption coefficients (pseudodielectric functions) and thickness measurement). The special small continuous flow cryostat had been designed for studies in the wide temperature range. The angles of incidence are changed from 45 to 70 degree(s) discretely by the position of the cryostat windows.

Paper Details

Date Published: 20 April 1998
PDF: 7 pages
Proc. SPIE 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997, (20 April 1998); doi: 10.1117/12.306252
Show Author Affiliations
Alla I. Belyaeva, Institute for Low Temperature Physics and Engineering (Ukraine)
T. G. Grebennik, Institute for Low Temperature Physics and Engineering (Ukraine)


Published in SPIE Proceedings Vol. 3359:
Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997
Sergey V. Svechnikov; Mikhail Ya. Valakh, Editor(s)

© SPIE. Terms of Use
Back to Top