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Proceedings Paper

Raman-scattering diagnostics of the structure of hydrogenated amorphous diamond-like carbon films
Author(s): Mikhail Ya. Valakh; O. V. Vasylyk; A. G. Gontar; A. M. Kutsay
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Paper Abstract

Hydrogenated amorphous diamond-like carbon (DLC) films produced by RF-glow discharge deposition from hydrocarbon mixtures in a parallel diode-type plasma reactor were investigated. The DLC films were obtained at various gas mixture compositions and bias voltages (Vb). Raman spectra of DLC films in the range 1000 - 1800 cm-1 were analyzed. Our results are given in terms of I(D)/I(G) intensity ratio, bands position, and width (FWHM) as a function of bias voltage and gas mixture. The analysis of Raman spectra shows that bias voltage value is critical for the DLC films structure. The increase of Vb from -200 V to -700 V results in the essential high-frequency shift of G- and D-bands and change of their intensities ratio I(D)/I(G) from 0.64 (Vb equals 200 V) to 3.2 (Vb equals 700 V). Similar high-frequency shift, change of FWHM and I(D)/I(G) intensities ratio were observed at the variation of methane concentration in gas mixture composition from 100 to 20%.

Paper Details

Date Published: 20 April 1998
PDF: 6 pages
Proc. SPIE 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997, (20 April 1998); doi: 10.1117/12.306245
Show Author Affiliations
Mikhail Ya. Valakh, Institute of Semiconductor Physics (Ukraine)
O. V. Vasylyk, Institute of Semiconductor Physics (Ukraine)
A. G. Gontar, Institute of Superhard Materials (Ukraine)
A. M. Kutsay, Institute of Superhard Materials (Ukraine)

Published in SPIE Proceedings Vol. 3359:
Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997
Sergey V. Svechnikov; Mikhail Ya. Valakh, Editor(s)

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