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Proceedings Paper

Nanostructure of a-C:N films characterized by Raman spectroscopy
Author(s): Andrey V. Vasin; O. V. Vasylyk; Ludmila A. Matveeva
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Paper Abstract

Amorphous carbon films prepared by nitrogen ions assisted thermal evaporation were analyzed by means of Raman scattering. It was shown that ion bombardment of substrate during carbon evaporation leads to a nanostructure reordering. It was analyzed the changes of Raman spectra characteristics with variation of ion bombardment conditions.

Paper Details

Date Published: 20 April 1998
PDF: 4 pages
Proc. SPIE 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997, (20 April 1998); doi: 10.1117/12.306244
Show Author Affiliations
Andrey V. Vasin, Institute of Semiconductor Physics (Russia)
O. V. Vasylyk, Institute of Semiconductor Physics (Ukraine)
Ludmila A. Matveeva, Institute of Semiconductor Physics (Ukraine)


Published in SPIE Proceedings Vol. 3359:
Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997
Sergey V. Svechnikov; Mikhail Ya. Valakh, Editor(s)

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