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Proceedings Paper

Ellipsometric probing of metallic mirrors with modified surfaces
Author(s): Leonid V. Poperenko; Vladimir S. Voitsenya; M. V. Vinnichenko
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Paper Abstract

Optical characterization of the Cu2+, Al2+ and Cr2+ ions implanted copper, aluminum and stainless steel mirrors respectively as well as the stainless steel mirrors with boron coatings was carried out by multiple angle of incidence ellipsometry. Both implanted and nonimplanted areas for aluminum, copper and stainless steel mirrors was then sputtered and probed. Changes of the optical properties of the stainless steel samples after bombardment by Cr2+ would occur due to the formation of a carbon layer on a mirror surface after the implantation, without modification of a microstructure of the surface. In case of the copper mirrors, irradiated by Cu2+ ions and aluminum mirrors implanted by Al2+ ions, the changes of optical parameters would be associated with modification of the subsurfaces layers' microstructure. The optical parameters and thicknesses of boron films on the stainless steel substrate were determined and were 7.3 nm and 16.8 nm respectively.

Paper Details

Date Published: 20 April 1998
PDF: 4 pages
Proc. SPIE 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997, (20 April 1998); doi: 10.1117/12.306202
Show Author Affiliations
Leonid V. Poperenko, Kiev Univ. (Ukraine)
Vladimir S. Voitsenya, Institute of Physics and Technology (Ukraine)
M. V. Vinnichenko, Kiev Univ. (Ukraine)


Published in SPIE Proceedings Vol. 3359:
Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997
Sergey V. Svechnikov; Mikhail Ya. Valakh, Editor(s)

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