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Proceedings Paper

Effects of titanium-silicide coating on the electrical characteristics of field emitters
Author(s): Alex Hariz; In-Jae Chung
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Paper Abstract

Silicidation of field emission tips brings about many improvements in device performance and long term reliability. Here we investigate the merits of titanium silicide coating as compared to other silicides including chromium. The silicidation takes place in two steps, deposition and high temperature alloying technique. Surface morphology was inspected and electrical characteristics were measured and compared with bare-silicon tips. The results show marked improvements in terms of lower turn-on voltage, enhanced emission, reduced current fluctuations, and homogeneous arrays. Moreover, titanium-silicide protected tips were harder, thermally stable, and discharge resistant.

Paper Details

Date Published: 16 April 1998
PDF: 5 pages
Proc. SPIE 3321, 1996 Symposium on Smart Materials, Structures, and MEMS, (16 April 1998); doi: 10.1117/12.305613
Show Author Affiliations
Alex Hariz, Univ. of South Australia (Australia)
In-Jae Chung, Univ. of South Australia (Australia)


Published in SPIE Proceedings Vol. 3321:
1996 Symposium on Smart Materials, Structures, and MEMS
Vasu K. Aatre; Vijay K. Varadan; Vasundara V. Varadan, Editor(s)

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