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Proceedings Paper

Micromechanical components with novel properties
Author(s): U. D. Vaishnav; Prakash R. Apte; S. G. Lokhre; V. R. Palkar; S. M. Pattalwar
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Paper Abstract

This paper describes the fabrication techniques and characterization of silicon dioxide micromechanical components with a layer of porous aluminum oxide which results in novel properties. An aqueous SOL process has been developed to obtain a layer of porous aluminum oxide on the silicon dioxide. The micro-porous surface, so realized, can be used as sensitive moisture and gas detectors. Various parts fabricated in silicon dioxide are cantilever, cross beam, spiral spring and resonator, coated with porous aluminum oxide, and micro-probes, coated with chromium-gold for electrical contacts. This paper also demonstrates the use of the trapezoidal pit etched in silicon during micromachining as a radiation concentrator. The results of derivation of the concentrator efficiency clearly shows the advantage of the reflections from the trapezoidal cavity.

Paper Details

Date Published: 16 April 1998
PDF: 11 pages
Proc. SPIE 3321, 1996 Symposium on Smart Materials, Structures, and MEMS, (16 April 1998); doi: 10.1117/12.305561
Show Author Affiliations
U. D. Vaishnav, Tata Institute of Fundamental Research (India)
Prakash R. Apte, Tata Institute of Fundamental Research (India)
S. G. Lokhre, Tata Institute of Fundamental Research (India)
V. R. Palkar, Tata Institute of Fundamental Research (India)
S. M. Pattalwar, Tata Institute of Fundamental Research (India)


Published in SPIE Proceedings Vol. 3321:
1996 Symposium on Smart Materials, Structures, and MEMS
Vasu K. Aatre; Vijay K. Varadan; Vasundara V. Varadan, Editor(s)

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