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Proceedings Paper

Fabrication of a thick nickel microvalve with truncated pyramid shape
Author(s): In-Byeong Kang; Malcolm R. Haskard; Noel D. Samaan; Peter Orders
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Paper Abstract

Float type micro valves can be employed in very high output pressure micropumps. They provide a very large forward to reverse flow ratio with a low leakage flow rate at high applied pressures. The valve described in this paper is a thick metal 3D structure having an excellent dimension match to the valve orifice. The valve having a thick truncated pyramid shape was successfully manufactured using an electroplating process and a silicon mould. The mould was made by anisotropic silicon etching, the truncated pyramid shape being defined by <111> crystal planes. A fine and uniform nickel structure was obtained using an agitated nickelsulphamate electrolyte, buffered with boric acid. Because of precise crystal orientations this process allows the valve to fit snugly into the valve orifice.

Paper Details

Date Published: 16 April 1998
PDF: 7 pages
Proc. SPIE 3321, 1996 Symposium on Smart Materials, Structures, and MEMS, (16 April 1998); doi: 10.1117/12.305560
Show Author Affiliations
In-Byeong Kang, Univ. of South Australia (Australia)
Malcolm R. Haskard, Univ. of South Australia (Australia)
Noel D. Samaan, Univ. of South Australia (Australia)
Peter Orders, Univ. of South Australia (Australia)


Published in SPIE Proceedings Vol. 3321:
1996 Symposium on Smart Materials, Structures, and MEMS

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