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Proceedings Paper

Generation of microstructures in silicon for MEMS applications
Author(s): Amita Gupta; Mahnder. Pal; P. P. Puri; Ranvir Singh; D. S. Ahuja
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Paper Abstract

Excellent mechanical properties of silicon together with the advantage of fabrication of the IC circuitary on the same chip make it a very viable material for sensors. Thin membranes and diaphragms generated in crystalline silicon form an integral part of many micromechanical systems. In this paper, comparison of various techniques for bulk micromachining of silicon to create new structures is discussed. A new technique based on porous silicon formation using selective anodization is presented which is useful for generating different patterns required for making sensor arrays.

Paper Details

Date Published: 16 April 1998
PDF: 9 pages
Proc. SPIE 3321, 1996 Symposium on Smart Materials, Structures, and MEMS, (16 April 1998); doi: 10.1117/12.305550
Show Author Affiliations
Amita Gupta, Solid State Physics Lab. (India)
Mahnder. Pal, Solid State Physics Lab. (India)
P. P. Puri, Solid State Physics Lab. (India)
Ranvir Singh, Solid State Physics Lab. (India)
D. S. Ahuja, Solid State Physics Lab. (India)


Published in SPIE Proceedings Vol. 3321:
1996 Symposium on Smart Materials, Structures, and MEMS
Vasu K. Aatre; Vijay K. Varadan; Vasundara V. Varadan, Editor(s)

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