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Proceedings Paper

Oxide-confined 2D VCSEL arrays for high-density inter/intra-chip interconnects
Author(s): Roger King; Rainer Michalzik; Christian Jung; Martin Grabherr; Franz Eberhard; Roland Jaeger; Peter Schnitzer; Karl Joachim Ebeling
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Paper Abstract

We have designed and fabricated 4 X 8 vertical-cavity surface-emitting laser (VCSEL) arrays intended to be used as transmitters in short-distance parallel optical interconnects. In order to meet the requirements of 2D, high-speed optical links, each of the 32 laser diodes is supplied with two individual top contacts. The metallization scheme allows flip-chip mounting of the array modules junction-side down on silicon complementary metal oxide semiconductor (CMOS) chips. The optical and electrical characteristics across the arrays with device pitch of 250 micrometers are quite homogeneous. Arrays with 3 micrometers , 6 micrometers and 10 micrometers active diameter lasers have been investigated. The small devices show threshold currents of 600 (mu) A, single-mode output powers as high as 3 mW and maximum wavelength deviations of only 3 nm. The driving characteristics of all arrays are fully compatible to advanced 3.3 V CMOS technology. Using these arrays, we have measured small-signal modulation bandwidths exceeding 10 GHz and transmitted pseudo random data at 8 Gbit/s channel over 500 m graded index multimode fiber. This corresponds to a data transmission rate of 256 Gbit/s per array of 1 X 2 mm2 footprint area.

Paper Details

Date Published: 20 April 1998
PDF: 8 pages
Proc. SPIE 3286, Vertical-Cavity Surface-Emitting Lasers II, (20 April 1998); doi: 10.1117/12.305445
Show Author Affiliations
Roger King, Univ. of Ulm (Germany)
Rainer Michalzik, Univ. of Ulm (Germany)
Christian Jung, Univ. of Ulm (Germany)
Martin Grabherr, Univ. of Ulm (Germany)
Franz Eberhard, Univ. of Ulm (Germany)
Roland Jaeger, Univ. of Ulm (Germany)
Peter Schnitzer, Univ. of Ulm (Germany)
Karl Joachim Ebeling, Univ. of Ulm (Germany)


Published in SPIE Proceedings Vol. 3286:
Vertical-Cavity Surface-Emitting Lasers II
Kent D. Choquette; Robert A. Morgan, Editor(s)

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