Share Email Print

Proceedings Paper

Large bandgap shift in InGaAs(P)/InP multi-quantum well structure obtained by impurity-free vacancy diffusion using SiO2 capping and its application to photodetectors
Author(s): Sang-Kee Si; Sung-June Kim; Ju-Han Lee; Deok Ho Yeo; Kyung-Hun Yoon
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

In this paper, we have investigated the bandgap tuning in the InGaAs InP multiquantum well structure obtained by impurity-free vacancy diffusion using low temperature photoluminescence (PL). The MQW intermixing was performed in a rapid thermal annealer (RTA) using the dielectric capping materials, SiO2 and SiNx. The SiO2 capping was successfully used with InGaAs cap layer to cause a large bandgap tuning effect in the InGaAs/InP MQW material. The blue shift of bandgap energy after RTA treatment was as much as 185 and 230 meV at 750 degrees C and 850 degrees C, respectively, with its value controllable using annealing time and temperature. Samples with SiO2-InP or SiNx- InGaAs cap layer combinations, on the other hand, did not show any significant energy shifts. The absorption spectra taken from the same samples confirmed the energy shifts obtained using PL. The process development can be readily applied to fabrication of photodetectors that are sensitive to wavelength and/or polarization.

Paper Details

Date Published: 8 April 1998
PDF: 8 pages
Proc. SPIE 3287, Photodetectors: Materials and Devices III, (8 April 1998); doi: 10.1117/12.304469
Show Author Affiliations
Sang-Kee Si, Seoul National Univ. (South Korea)
Sung-June Kim, Seoul National Univ. (South Korea)
Ju-Han Lee, Seoul National Univ. (South Korea)
Deok Ho Yeo, Seoul National Univ. (South Korea)
Kyung-Hun Yoon, Seoul National Univ. (South Korea)

Published in SPIE Proceedings Vol. 3287:
Photodetectors: Materials and Devices III
Gail J. Brown, Editor(s)

© SPIE. Terms of Use
Back to Top