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Proceedings Paper

Monolithic hemispherical microlenses fabricated by selective oxidation of AlGaAs
Author(s): Yong Xu; Chuan-Cheng Cheng; Reginald K. Lee; John D. O'Brien; Amnon Yariv; Axel Scherer
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Paper Abstract

We have developed a new method for the fabrication of monolithic AlGaAs microlenses on the surface of GaAs/AlGaAs light emitting diodes by combing crystal growth, ion etching and steam oxidation with wet chemical removal of the oxide. Control over the precise processing parameters has resulted in the precise control over the shape, radius, position and smoothness of the microfabricated hemispheres. These microlenses can readily be used for the fabrication of highly efficient light-emitting diodes.

Paper Details

Date Published: 7 April 1998
PDF: 8 pages
Proc. SPIE 3279, Light-Emitting Diodes: Research, Manufacturing, and Applications II, (7 April 1998); doi: 10.1117/12.304423
Show Author Affiliations
Yong Xu, California Institute of Technology (United States)
Chuan-Cheng Cheng, California Institute of Technology (United States)
Reginald K. Lee, California Institute of Technology (United States)
John D. O'Brien, Univ. of Southern California (United States)
Amnon Yariv, California Institute of Technology (United States)
Axel Scherer, California Institute of Technology (United States)


Published in SPIE Proceedings Vol. 3279:
Light-Emitting Diodes: Research, Manufacturing, and Applications II
E. Fred Schubert, Editor(s)

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