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Proceedings Paper

Comparison of surface PSDs calculated from both AFM profiles and scatter data
Author(s): John C. Stover; Vladimir I. Ivakhnenko; Craig A. Scheer
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Paper Abstract

The paper reviews the process for comparing PSD's generated by profile measurements and scatter measurements. Rayleigh scatter as a noise source is reviewed and a new polarization based measurement is presented for discrimination between roughness scatter and particulate scatter. AFM results are compared for both a molybdenum mirror and a silicon wafer. The mirror compares well but 2D detrending technique used impacts the results for the wafer.

Paper Details

Date Published: 1 April 1998
PDF: 10 pages
Proc. SPIE 3275, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II, (1 April 1998); doi: 10.1117/12.304410
Show Author Affiliations
John C. Stover, ADE Optical Systems (United States)
Vladimir I. Ivakhnenko, ADE Optical Systems (United States)
Craig A. Scheer, ADE Optical Systems (United States)


Published in SPIE Proceedings Vol. 3275:
Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II
John C. Stover, Editor(s)

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