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Proceedings Paper

New software algorithm of 3D surface profile measurement based on phase-shift interfering technology
Author(s): Bo Liu; Jianying Fan; Ling Yang; Qi-Shan Wang
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Paper Abstract

In our profiler, software is the key-point. During the course of reference height of each point of the surface by computation and comparison of modulation M and so we can get surface profile. In the course of computation and comparison of modulation M, the ability of software will decide whether our profiler can be applied into practice. In this paper, we did some research work in software, and provided three- frame, five-frame and digited filer processing ways.

Paper Details

Date Published: 1 April 1998
PDF: 6 pages
Proc. SPIE 3275, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II, (1 April 1998); doi: 10.1117/12.304406
Show Author Affiliations
Bo Liu, Harbin Univ. of Science and Technology (China)
Jianying Fan, Harbin Univ. of Science and Technology (China)
Ling Yang, Harbin Univ. of Science and Technology (China)
Qi-Shan Wang, Harbin Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 3275:
Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II
John C. Stover, Editor(s)

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