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Proceedings Paper

Novel method for beam collimation using multiple-beam shearing interferometry
Author(s): Kiyofumi Matsuda; Maitreyee Roy; Pal W. Fekete; Tomoaki Eiju; Colin J. R. Sheppard; John W. O'Byrne
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Paper Abstract

This paper describes the application of Multiple Beam Shearing Interferometry (MBSI) to beam collimation. To realize MBSI, a plate with two optically flat surfaces, wedged slightly in thickness at an angle of 2.7 arc seconds and coated with silver is used. A high reflecting coating, in our case with 90% reflectance, is necessary to ensure that multiple beams occur resulting in sharp fringes for the transmitted light. Without the high reflecting coating the transmittance level is unsuitable for beam collimation. The small wedge angle is necessary for high accuracy. When a collimated beam is incident on the plate a sharp horizontal fringe line is observed because of the wedge in the plate. When the beam is not collimated the effect of the wedge and shear of the wavefront results in oblique fringe lines. In this paper, theoretical calculations, sensitivity of collimation and experimental results are discussed.

Paper Details

Date Published: 1 April 1998
PDF: 7 pages
Proc. SPIE 3275, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II, (1 April 1998); doi: 10.1117/12.304405
Show Author Affiliations
Kiyofumi Matsuda, Univ. of Sydney (Australia)
Maitreyee Roy, Univ. of Sydney (Australia)
Pal W. Fekete, Univ. of Sydney (Australia)
Tomoaki Eiju, Mechanical Engineering Lab. (Japan)
Colin J. R. Sheppard, Univ. of Sydney (Australia)
John W. O'Byrne, Univ. of Sydney (Australia)


Published in SPIE Proceedings Vol. 3275:
Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II
John C. Stover, Editor(s)

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