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Proceedings Paper

Comparison of models and measurements of scatter from surface-bound particles
Author(s): Craig A. Scheer; John C. Stover; Vladimir I. Ivakhnenko
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Paper Abstract

The paper reviews techniques to calculate differential scattering cross-section of sub-micron surface bound particles from scatter measurement. It discusses both the multiple and single particle measurement approaches to obtaining scatter data and the associated problems with each method. Measured results are compared to a scatter model based on the discrete source method. For spherical particles the model has very close agreement with the measured scatter. For non-spherical particles the agreement is close only for particle diameters smaller than about one fifth wavelength.

Paper Details

Date Published: 1 April 1998
PDF: 10 pages
Proc. SPIE 3275, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II, (1 April 1998); doi: 10.1117/12.304395
Show Author Affiliations
Craig A. Scheer, ADE Optical Systems (United States)
John C. Stover, ADE Optical Systems (United States)
Vladimir I. Ivakhnenko, ADE Optical Systems (United States)


Published in SPIE Proceedings Vol. 3275:
Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II
John C. Stover, Editor(s)

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